CASPIAN JOURNAL

MANAGEMENT AND HIGH TECHNOLOGIES

Getting quaternary compounds A3B5 by ion-beam deposition

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Getting quaternary compounds A3B5 by ion-beam deposition  // Caspian journal : management and high technologies. — 2010. — №4. — pp. 83-88.

An application of technology of ion-beam deposition for multicomponent semiconducting A3B5 compounds is considered in the article. A design of the installation of the ion-beam deposition and related equipment is described. An experiment to obtain quaternary compounds is considered. Experimental data is given.

Key words: technology of ion-beam deposition,multi-component semiconductor compounds А3В5,design of assembling,experiment.