CASPIAN JOURNAL

MANAGEMENT AND HIGH TECHNOLOGIES

PECULIARITIES OF SURFACE ACOUSTIC WAVE (SAW) SENSORS NUMERICAL MODELING USING FINITE-ELEMENT METHOD

Read Lunin Leonid S., Kataev Vladimir F., Kreys Ivan V.  PECULIARITIES OF SURFACE ACOUSTIC WAVE (SAW) SENSORS NUMERICAL MODELING USING FINITE-ELEMENT METHOD // Caspian journal : management and high technologies. — 2011. — №3. — pp. 39-47.

Lunin Leonid S. - D.Sc. in Physics and Mathematics, South Russian State Technical University (Novocherkassk Polytechnic Institute), 132 Prosvetsheniya st., Novocherkassk, the Rostov region, 347360, Russia, Lunin_ls@yandex.ru.

Kataev Vladimir F. - Postgraduate student, South Russian State Technical University (Novocherkassk Polytechnic Institute), 132 Prosvetsheniya st., Novocherkassk, the Rostov region, 347360, Russia, director-general Сlose corporation "Institute of thermoelectricity", 73/94 Lenina str., Volgodonsk, the Rostov region, 347360, Russia, kvf@volgodonsk.ru.

Kreys Ivan V. - Postgraduate student, South Russian State Technical University (Novocherkassk Polytechnic Institute), 132 Prosvetsheniya st., Novocherkassk, the Rostov region, 347360, Russia, ikreuz@yandex.ru.

Surface acoustic wave sensors serve for physical and chemical values measurement: pressure, temperatures, chemical properties, a magnetic field, etc. The principle of their operation is on 2 physical phenomena based: surface acoustic waves and piezoelectricity. Surface acoustic wave sensors, considered in this article, are resonator-type sensors. Finite-element mathematical model and the analysis of a surface acoustic wave devices frequency response differ from earlier developed subjects, that modeling of electromechanical properties of the sensor is produced with minimum number of assumptions and approximations. Surface acoustic waves propagation for piezoelectric materials is described by two systems of equations: mechanical motion equations and Maxwell’s equations for the description of the electrical phenomena. As the surface acoustic waves are in a typical piezoelectric material approximately on five magnitude orders more slowly, than piezoelectric communication electromagnetic waves, it is possible to consider acoustic waves quasistatic. Innterrogation of sensors can be produced on a radio channel. Thus the signal of the interrogated device arrives at the sensor, control antenna, which center frequency has changed under the influence of the enclosed parameter of an external environment (deformation, temperature etc.). The sensor’s response signal will carry in itself value of the changed center frequency.

Key words: final elements method,superficial acoustic waves,the gauge,the sensitive element,Maxwell’s equations,Galerkin’s method,Skyline-method,thermostable quartz,interdigital transducer,resonant frequency,deformation.